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Invention Grant
US09199458B2 Electromechanical transducer element, method of producing electromechanical transducer element, inkjet recording head, and inkjet recording apparatus 有权
机电换能器元件，制造机电换能器元件的方法，喷墨记录头和喷墨记录装置

Electromechanical transducer element, method of producing electromechanical transducer element, inkjet recording head, and inkjet recording apparatus
Abstract:
An electromechanical transducer element includes a substrate; a common electrode disposed on the substrate; an electromechanical transducer film formed on the common electrode; an individual electrode formed on the electromechanical transducer film; a common electrode pad electrically connected to the common electrode; an individual electrode pad electrically connected to the individual electrode; and an insulation protective film formed on the common electrode and the individual electrode, contacting an upper end of the individual electrode pad, and surrounding a side surface of the individual electrode pad. The insulation protective film has a gradually decreasing thickness outward from an end of the individual electrode pad.
Abstract(Chinese):

机电换能器元件包括基底; 设置在基板上的公共电极; 形成在公共电极上的机电换能器膜; 在机电换能器膜上形成的单个电极; 电连接到公共电极的公共电极焊盘; 电连接到单独电极的单独电极焊盘; 以及形成在公共电极和单独电极上的绝缘保护膜，其与单个电极焊盘的上端接触并围绕单个电极焊盘的侧表面。 绝缘保护膜从单独电极焊盘的端部向外侧逐渐减小。

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