Invention Grant
- Patent Title: Sensor protective coating
- Patent Title (中): 传感器保护涂层
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Application No.: US14069633Application Date: 2013-11-01
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Publication No.: US09199840B2Publication Date: 2015-12-01
- Inventor: Dubravka Bilic , Stephen R. Hooper
- Applicant: Dubravka Bilic , Stephen R. Hooper
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Agency: Lempia Summerfield Katz LLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G01L9/00 ; B81C1/00 ; B81B7/00
Abstract:
A method of fabricating a sensor device includes forming a plurality of sensor structures on a wafer, covering the plurality of sensor structures with a polymer layer, and dicing the wafer into a plurality of die while each sensor structure remains covered by the polymer layer.
Public/Granted literature
- US20150123222A1 Sensor Protective Coating Public/Granted day:2015-05-07
Information query
IPC分类:
