Invention Grant
US09200098B2 Radiation-sensitive composition and compound 有权
辐射敏感组合物和化合物

Radiation-sensitive composition and compound
Abstract:
A radiation-sensitive composition includes a photoacid generator shown by a general formula (0-1a). Each of R0 individually represents a substituted or unsubstituted organic group which includes a carbon atom, a hydrogen atom, and an oxygen atom, and which includes at least one ester bond, and M+ represents a monovalent onium cation. A compound is shown by a general formula (0). R represents a substituted or unsubstituted organic group which includes a carbon atom, a hydrogen atom, and an oxygen atom, and which includes at least one ester bond, and M+ represents a monovalent onium cation.
Public/Granted literature
Information query
Patent Agency Ranking
0/0