Invention Grant
- Patent Title: Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method using the substrate holder stocker device
- Patent Title (中): 基板支架保持架装置,基板处理装置以及基板保持架移动方法
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Application No.: US13177735Application Date: 2011-07-07
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Publication No.: US09200362B2Publication Date: 2015-12-01
- Inventor: Ryuji Higashisaka , Hiroshi Sone
- Applicant: Ryuji Higashisaka , Hiroshi Sone
- Applicant Address: JP Kawasaki-shi
- Assignee: Canon Anelva Corporation
- Current Assignee: Canon Anelva Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2010-156324 20100709
- Main IPC: H01L21/677
- IPC: H01L21/677 ; C23C14/56 ; C23C14/50

Abstract:
A substrate holder stocker device capable of reducing foot print is provided. The device includes: a movable table A which holds a plurality of substrate holders side by side in a plate thickness direction thereof and moves back and forth; a movable table B which is provided parallel to the movable table A and holds a plurality of the substrate holders side by side in a plate thickness direction thereof, and which moves back and forth; and an inter-table transfer mechanism for allowing the substrate holder which is held by one of the movable tables A and B stopped at predetermined positions to be held by the other of the movable tables A and B.
Public/Granted literature
Information query
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