Invention Grant
- Patent Title: Single-crystal manufacturing method and single-crystal manufacturing apparatus
- Patent Title (中): 单晶制造方法和单晶制造装置
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Application No.: US13125899Application Date: 2009-10-19
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Publication No.: US09200380B2Publication Date: 2015-12-01
- Inventor: Suguru Matsumoto , Susumu Sonokawa , Toshiharu Uesugi , Takashi Mori
- Applicant: Suguru Matsumoto , Susumu Sonokawa , Toshiharu Uesugi , Takashi Mori
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2008-310088 20081204
- International Application: PCT/JP2009/005438 WO 20091019
- International Announcement: WO2010/064356 WO 20100610
- Main IPC: C30B15/30
- IPC: C30B15/30 ; C30B29/06 ; C30B35/00

Abstract:
The present invention provides a silicon single crystal manufacturing method for manufacturing a single crystal based on a horizontal magnetic field applied CZ method for pulling the single crystal while applying a horizontal magnetic field to a silicon raw material melt accommodated in a quartz crucible by a magnetic field application device, comprising: measuring a center position of the magnetic field generated by the magnetic field application device; and deviating the measured center position of the magnetic field from a pulling member serving as a rotation axis of the single crystal in a horizontal direction within the range of 2 to 14 mm before manufacture of the single crystal and/or during manufacture of the single crystal. As a result, the silicon single crystal manufacturing method and manufacturing apparatus that enable manufacture of a single crystal while suppressing fluctuations in diameter and in oxygen concentration without a variation caused due to characteristics of the apparatus can be provided.
Public/Granted literature
- US20110214605A1 SINGLE-CRYSTAL MANUFACTURING METHOD AND SINGLE-CRYSTAL MANUFACTURING APPARATUS Public/Granted day:2011-09-08
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