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US09200689B2 Single-axis flexure bearing configurations 有权
单轴挠曲轴承配置

Single-axis flexure bearing configurations
Abstract:
Flexure bearing systems and configurations guide translational motion along a single-axis in micro and macro applications such as micro-electro-mechanical system (MEMS) devices including sensors and actuators like electrostatic comb-drive actuators. The flexure bearing systems and configurations described herein provide an improved constraint against movement (i.e., stiffness) of the primary mover in non-motion axes such as a bearing axis.
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