Invention Grant
- Patent Title: Device for determination of gas concentration
- Patent Title (中): 气体浓度测定装置
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Application No.: US13851879Application Date: 2013-03-27
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Publication No.: US09201007B2Publication Date: 2015-12-01
- Inventor: Dieter Kohlert , Gerhard Poeppel , Franz Schreier
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater & Matsil, L.L.P.
- Priority: DE102012006047 20120327
- Main IPC: G01J3/00
- IPC: G01J3/00 ; G01N21/61 ; G01N21/3504 ; G01N21/35

Abstract:
A device can be used for establishing gas concentrations in an examination volume. A radiation source is configured to generate an electromagnetic beam. A beam guiding apparatus is arranged downstream of the radiation source. The beam guiding apparatus is configured to set a plurality of variations of beam guidance of the beam entering the beam guiding apparatus in an observation plane in the examination volume. A spectrometer is arranged downstream of the beam guiding apparatus. The spectrometer is configured to carry out a spectral analysis of the beam leaving the beam guiding apparatus. An evaluation unit is configured to establish in the observation plane a 2D concentration distribution for one or more gases in the examination volume on the basis of the spectral analysis for different variations of beam guidance.
Public/Granted literature
- US20130258315A1 Device for Determination of Gas Concentration Public/Granted day:2013-10-03
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