Invention Grant
- Patent Title: Template and pattern forming method
- Patent Title (中): 模板和图案形成方法
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Application No.: US13480905Application Date: 2012-05-25
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Publication No.: US09201297B2Publication Date: 2015-12-01
- Inventor: Yukiko Kikuchi , Shinichi Ito
- Applicant: Yukiko Kikuchi , Shinichi Ito
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP2009-219687 20090924
- Main IPC: B29C59/02
- IPC: B29C59/02 ; G03F7/00 ; H01L21/768 ; H01L23/00 ; H01L23/544 ; H01L23/58
Abstract:
A template for imprinting in which a pattern is transferred onto a first substrate applied curable resin thereon, including a second substrate having a surface to be contacted with the curable resin, a concave portion provided on the surface and corresponding to a pattern to be transferred onto the first substrate, and at least one convex portion arranged in the concave portion to decrease volume of the concave portion.
Public/Granted literature
- US20120231629A1 TEMPLATE AND PATTERN FORMING METHOD Public/Granted day:2012-09-13
Information query
