Invention Grant
- Patent Title: Polishing liquid for metal and polishing method using the same
- Patent Title (中): 抛光液用于金属和抛光方法使用
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Application No.: US12399984Application Date: 2009-03-09
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Publication No.: US09202709B2Publication Date: 2015-12-01
- Inventor: Takamitsu Tomiga , Tomoo Kato , Tadashi Inaba , Masaru Yoshikawa
- Applicant: Takamitsu Tomiga , Tomoo Kato , Tadashi Inaba , Masaru Yoshikawa
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: SOLARIS Intellectual Property Group, PLLC
- Priority: JP2008-070895 20080319
- Main IPC: C09K13/06
- IPC: C09K13/06 ; H01L21/321 ; C09G1/02 ; C09K3/14

Abstract:
A liquid for polishing a metal is provided that is used for chemically and mechanically polishing a conductor film including copper or a copper alloy in production of a semiconductor device, and a polishing method using the metal-polishing liquid is also provided. The liquid includes: (a) colloidal silica particles having an average primary particle size of from 10 nm to 25 nm and an average secondary particle size of from 50 nm to 70 nm; (b) a metal anticorrosive agent; (c) at least one compound selected from the group consisting of a surfactant and a water-soluble polymer compound; (d) an oxidizing agent; and (e) an organic acid.
Public/Granted literature
- US20090239380A1 POLISHING LIQUID FOR METAL AND POLISHING METHOD USING THE SAME Public/Granted day:2009-09-24
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