Invention Grant
- Patent Title: Apparatus and method for detecting substrates
- Patent Title (中): 用于检测基板的装置和方法
-
Application No.: US13121498Application Date: 2009-09-29
-
Publication No.: US09202732B2Publication Date: 2015-12-01
- Inventor: Masayuki Enomoto , Masao Takatori , Yohichi Nakamura
- Applicant: Masayuki Enomoto , Masao Takatori , Yohichi Nakamura
- Applicant Address: JP Kobe
- Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee Address: JP Kobe
- Agency: Oliff PLC
- Priority: JP2008-256268 20081001
- International Application: PCT/JP2009/066938 WO 20090929
- International Announcement: WO2010/038735 WO 20100408
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
The substrate detection apparatus includes: a collimating reflector located on one side of substrates; an illumination unit configured to radiate light in a planar state toward the collimating reflector such that edge portions of the substrates are located in an optical path of the light; an image acquiring unit configured to acquire a passing light image including the edge portions formed on the collimating reflector with the light radiated in the planar state from the illumination unit; and an image processing unit configured to process the passing light image obtained by the image acquiring unit, thereby detecting the conditions of the substrates.
Public/Granted literature
- US20110205354A1 APPARATUS AND METHOD FOR DETECTING SUBSTRATES Public/Granted day:2011-08-25
Information query
IPC分类: