Invention Grant
US09202738B2 Pneumatic end effector apparatus and substrate transportation systems with annular flow channel
有权
气动端部效应器装置和具有环形流动通道的基底输送系统
- Patent Title: Pneumatic end effector apparatus and substrate transportation systems with annular flow channel
- Patent Title (中): 气动端部效应器装置和具有环形流动通道的基底输送系统
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Application No.: US14496088Application Date: 2014-09-25
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Publication No.: US09202738B2Publication Date: 2015-12-01
- Inventor: Daniel Greenberg , Ayan Majumdar
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/683 ; H01L21/677 ; B25J15/00 ; B25J15/06 ; H01L21/687
Abstract:
Systems, apparatus and methods including pneumatic end effectors for transporting substrates between system components of electronic device manufacturing systems are provided. In one aspect, an end effector has a base adapted to be connected to a robotic component, and one or more pneumatic suction elements positioned on the base. Applying a pneumatic source to the pneumatic suction element draws a substrate into contact with contact pads of the end effector. Methods and systems, as well as numerous other aspects are disclosed.
Public/Granted literature
Information query
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