An anode for a secondary battery capable of improving cycle characteristics, a secondary battery using the anode, and a method of manufacturing an anode for secondary battery. An anode active material layer is formed by vapor phase deposition method, and contains Si as an element. In the anode active material layer, there are a plurality of primary particles grown in the thickness direction. The primary particles aggregate and form a plurality of secondary particles. At least some of the primary particles have shape curved in the identical direction to an anode current collector on the cross section in the thickness direction. Thereby, stress due to expansion and shrinkage due to charge and discharge can be relaxed.