Invention Grant
- Patent Title: Rotating vacuum chamber coupling assembly
- Patent Title (中): 旋转真空室联轴器组件
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Application No.: US14403289Application Date: 2014-03-11
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Publication No.: US09203200B2Publication Date: 2015-12-01
- Inventor: Richard J. Fowler , Michael D. Drory
- Applicant: The Timken Company
- Applicant Address: US OH North Canton
- Assignee: The Timken Company
- Current Assignee: The Timken Company
- Current Assignee Address: US OH North Canton
- Agency: Michael Best & Friedrich LLP
- International Application: PCT/US2014/023234 WO 20140311
- International Announcement: WO2014/159367 WO 20141002
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306 ; H01R39/64 ; C23C14/50 ; H01J37/32 ; C23C16/458 ; C23C16/50

Abstract:
A coupling (30) for the introduction of a bias voltage into a vacuum chamber. The coupling consists of a metallic ball bearing assembly (36), a bearing sleeve or cup (34), and an EMI shielding gasket (42) seated within the bearing sleeve or cup. The ball bearing assembly is fitted within the EMI shielding gasket, about a metallic shaft (32) which, in turn, is coupled to a source of the bias voltage. The bearing sleeve or cup is, in turn, coupled to a rotating component such as a platen, for receiving the bias voltage within the vacuum chamber.
Public/Granted literature
- US20150104958A1 ROTATING VACUUM CHAMBER COUPLING ASSEMBLY Public/Granted day:2015-04-16
Information query
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