Invention Grant
- Patent Title: Autotuned screen printing process
- Patent Title (中): 自动调谐丝网印刷过程
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Application No.: US13202965Application Date: 2009-05-25
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Publication No.: US09204556B2Publication Date: 2015-12-01
- Inventor: Andrea Baccini , Marco Galiazzo
- Applicant: Andrea Baccini , Marco Galiazzo
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Priority: ITUD2009A0043 20090223
- International Application: PCT/EP2009/056326 WO 20090525
- International Announcement: WO2010/094345 WO 20100826
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H05K3/12 ; B41F15/08 ; B41F15/20 ; H01L21/67 ; H01L31/0224 ; H01L31/18 ; H05K3/00

Abstract:
Embodiments of the invention generally provide apparatus and methods of screen printing a pattern on a substrate. In one embodiment, a patterned layer is printed onto a surface of a substrate along with a plurality of alignment marks. The locations of the alignment marks are measured with respect to a feature of the substrate to determine the actual location of the patterned layer. The actual location is compared with the expected location to determine the positional error of the patterned layer placement on the substrate. This information is used to adjust the placement of a patterned layer onto subsequently processed substrates.
Public/Granted literature
- US20120045852A1 AUTOTUNED SCREEN PRINTING PROCESS Public/Granted day:2012-02-23
Information query
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