Invention Grant
- Patent Title: Environmental sensitive electronic device package and manufacturing method thereof
- Patent Title (中): 环境敏感电子器件封装及其制造方法
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Application No.: US14073875Application Date: 2013-11-07
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Publication No.: US09204557B2Publication Date: 2015-12-01
- Inventor: Hsiao-Yen Lee , Yu-Yang Chang , Pao-Ming Tsai
- Applicant: Industrial Technology Research Institute
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW102120560A 20130610
- Main IPC: H05K1/00
- IPC: H05K1/00 ; H05K3/28 ; G06F1/16 ; H01L51/52

Abstract:
An environmental sensitive electronic device package including a first substrate, a second substrate, an environmental sensitive electronic device, gas barrier structures, micro-structures, and a filler layer is provided. The second substrate is located above the first substrate. The environmental sensitive electronic device is located on the first substrate. The gas barrier structures may be located between the first substrate and the second substrate and surround the environmental sensitive electronic device. The gas barrier structures have a first height. The micro-structures may be located between the first substrate and the second substrate and have a second height. A ratio of the second height to the first height ranges from 1/250 to 1/100. The filler layer may be located between the first substrate and the second substrate and covers the gas barrier structures and the environmental sensitive electronic device. A manufacturing method of an environmental sensitive electronic device package is also provided.
Public/Granted literature
- US20140160705A1 ENVIRONMENTAL SENSITIVE ELECTRONIC DEVICE PACKAGE AND MANUFACTURING METHOD THEREOF Public/Granted day:2014-06-12
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