Invention Grant
- Patent Title: Electronic grade glass substrate and making method
- Patent Title (中): 电子级玻璃基板及其制作方法
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Application No.: US13659137Application Date: 2012-10-24
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Publication No.: US09205528B2Publication Date: 2015-12-08
- Inventor: Daiyu Okafuji , Hiroyuki Yamazaki , Masaki Takeuchi
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2011-232522 20111024
- Main IPC: B32B3/00
- IPC: B32B3/00 ; B32B3/02 ; B24B37/04 ; G03F1/60 ; B24B37/02 ; B24B1/00 ; B24B5/50 ; B24B7/22 ; B24B9/06
Abstract:
An electronic grade glass substrate is provided with a recess, channel or step in one surface, and a first chamfer between the side surface of the recess, channel or step and the one surface. The side and bottom surfaces of the recess, channel or step are mirror finished, and the first chamfer is mirror finished.
Public/Granted literature
- US20130101790A1 ELECTRONIC GRADE GLASS SUBSTRATE AND MAKING METHOD Public/Granted day:2013-04-25
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