Invention Grant
- Patent Title: Controlling the melt front of thin film applications
- Patent Title (中): 控制薄膜应用的熔融前沿
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Application No.: US13966622Application Date: 2013-08-14
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Publication No.: US09205631B2Publication Date: 2015-12-08
- Inventor: Stephen W. Bedell , John A. Ott
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC
- Current Assignee: GLOBALFOUNDRIES INC
- Current Assignee Address: KY Grand Cayman
- Agency: Tutunjian & Bitetto, P.C.
- Main IPC: B29C65/00
- IPC: B29C65/00 ; B32B37/00 ; B32B37/06 ; B32B37/04 ; H01L21/00 ; B23K3/04 ; B23K37/00 ; B23K37/06 ; H01L21/02 ; B32B9/04 ; B32B37/10 ; B32B15/00 ; B32B1/00

Abstract:
Systems and methods for bonding include selectively heating an initial location of a sample to melt a bonding layer at an interface between a first layer and a second layer of the sample. The heating is propagated in a direction away from the initial location such that a melt front of the bonding layer is translated across the interface to provide a void free bond between the first layer and the second layer.
Public/Granted literature
- US20150047781A1 CONTROLLING THE MELT FRONT OF THIN FILM APPLICATIONS Public/Granted day:2015-02-19
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