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US09205698B2 Method for forming through-hole in insulating substrate by using laser beam 有权
通过使用激光束在绝缘基板上形成通孔的方法

Method for forming through-hole in insulating substrate by using laser beam
Abstract:
A method including a) forming a through-hole in a dummy substrate including a surface by radiating a laser to the surface of the dummy substrate in a state where the dummy substrate is moved relative to the laser along a direction parallel to the surface of the dummy substrate, b) determining an angle α (−90°
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