Invention Grant
US09206065B2 Apparatus and method for baking glass substrate 有权
用于烘烤玻璃基板的装置和方法

Apparatus and method for baking glass substrate
Abstract:
The present invention discloses an apparatus for baking a glass substrate, which includes: a baking oven, a support component, a temperature sensing device, a heating device, a cooling device, and a temperature controlling device. The present invention further discloses a method for baking a glass substrate. The present invention is capable of dynamically controlling the temperature of the support component, which contacts the glass substrate. The temperature of the glass substrate keeps identical and the temperature of the support component keep identical, so as to prevent a Mura defect appearing on the glass substrate.
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