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US09206527B2 Carbon thin film, mold for molding optical element, and method for manufacturing optical element 有权
碳薄膜，用于模制光学元件的模具和用于制造光学元件的方法

Carbon thin film, mold for molding optical element, and method for manufacturing optical element
Abstract:
A ta-C thin film (1A) is formed by laminating a first unit structure (11) and a second unit structure (12) in this order on a base material (10). The first unit structure (11) has mutually different amounts of sp3 bonding in a first layer (11a) and a second layer (11b), and has mutually different amounts of sp3 bonding in the second layer (11b) and a third layer (11c). The second unit structure (12) has mutually different amounts of sp3 bonding in a first layer (12a) and a second layer (12b), and has mutually different amounts of sp3 bonding in the second layer (12b) and a third layer (12c).
Abstract(Chinese):

通过将第一单元结构（11）和第二单元结构（12）依次层叠在基材（10）上而形成ta-C薄膜（1A）。 第一单元结构（11）在第一层（11a）和第二层（11b）中具有相互不同量的sp 3键合，并且在第二层（11b）和第三层（11c）中具有相互不同量的sp 3键合 ）。 第二单元结构（12）在第一层（12a）和第二层（12b）中具有相互不同量的sp 3键合，并且在第二层（12b）和第三层（12c）中具有相互不同量的sp 3键合 ）。

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