Invention Grant
- Patent Title: Sample support apparatus
- Patent Title (中): 样品支持装置
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Application No.: US14185333Application Date: 2014-02-20
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Publication No.: US09207189B2Publication Date: 2015-12-08
- Inventor: Riki Ogawa , Hiromu Inoue
- Applicant: NuFlare Technology, Inc.
- Applicant Address: JP Yokohama
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Yokohama
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-39637 20130228; JP2013-254300 20131209
- Main IPC: G01N21/01
- IPC: G01N21/01 ; G01N21/956

Abstract:
A sample support apparatus is provided in which a XY-table and a Z-table moving along a height direction are disposed in a Z-reference surface as a height reference, and in which a sample is disposed at a predetermined height position while supported by the Z-table, the sample support apparatus comprising, a height correction unit that controls movement of the Z-table, and a Z-sensor that is provided on the Z-reference surface to measure the height from the Z-reference surface, wherein a measuring surface is aligned along the same axis with respect to a measuring position of the sample, the height of the measuring surface from the Z-reference surface is measured by the Z-sensor, the height correction unit moves the Z-table according to the measured value of the height so that the sample is disposed at the predetermined height position.
Public/Granted literature
- US20140240700A1 SAMPLE SUPPORT APPARATUS Public/Granted day:2014-08-28
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