Invention Grant
US09207277B2 System and method for generating a yield forecast based on wafer acceptance tests 有权
基于晶圆验收测试生成产量预测的系统和方法

System and method for generating a yield forecast based on wafer acceptance tests
Abstract:
A wafer acceptance test (WAT) system and method that, in one embodiment, includes: (1) a saturation current WAT subsystem operable to generate a weighted standard deviation based on target NMOS and PMOS saturation currents and saturation current WAT results, (2) a wafer IC speed WAT subsystem operable to generate a speed performance probability distribution of wafer ICs based on the weighted standard deviation and speed WAT results, (3) a wafer IC power WAT subsystem operable to employ the speed WAT results and power WAT results to generate a power performance model of wafer ICs, and (4) a yield calculator operable to generate a power performance variance probability distribution of wafer ICs based on the power performance model and the power WAT results, and to employ the speed performance probability distribution and the power performance variance probability distribution to generate the yield forecast with respect to a target performance profile.
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