Invention Grant
- Patent Title: Overhead buffer device and wafer transport system
- Patent Title (中): 架空缓冲装置和晶片输送系统
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Application No.: US13742533Application Date: 2013-01-16
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Publication No.: US09209056B2Publication Date: 2015-12-08
- Inventor: Hang-Hao Feng , Sheng-Jung Chang
- Applicant: INOTERA MEMORIES, INC.
- Applicant Address: TW Taoyuan County
- Assignee: Inotera Memories, Inc.
- Current Assignee: Inotera Memories, Inc.
- Current Assignee Address: TW Taoyuan County
- Agency: Rosenberg, Klein & Lee
- Priority: TW101138662A 20121019
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G49/07 ; B61B3/02 ; B61B10/02

Abstract:
An overhead buffer device used for disposing in a semi-conductor factory includes a strut module and a plurality of buffer modules. The strut module disposed on the top wall of the factory has a horizontal beam and a plurality of overhead strut. The overhead strut is set on the horizontal beam and spaced arranged along the horizontal beam. The buffer modules are installed on the overhead strut respectively. Each buffer module has a plurality of buffers arranged in sequence and along a vertical direction. Each buffer is used for receiving one front opening unified pod (FOUP). Thus, the instant disclosure can be used for using the space of the factory efficiently. Besides, the instant disclosure also provides a wafer transport system having the overhead buffer device.
Public/Granted literature
- US20140112740A1 OVERHEAD BUFFER DEVICE AND WAFER TRANSPORT SYSTEM Public/Granted day:2014-04-24
Information query
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