Invention Grant
- Patent Title: Temperature control method, storage medium storing a program therefor, temperature control apparatus, and heat treatment apparatus
- Patent Title (中): 温度控制方法,存储其程序的存储介质,温度控制装置和热处理装置
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Application No.: US13571011Application Date: 2012-08-09
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Publication No.: US09209057B2Publication Date: 2015-12-08
- Inventor: Koji Yoshii , Tatsuya Yamaguchi , Wenling Wang , Takanori Saito
- Applicant: Koji Yoshii , Tatsuya Yamaguchi , Wenling Wang , Takanori Saito
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2011-175175 20110810
- Main IPC: H05B1/02
- IPC: H05B1/02 ; H01L21/677 ; H01L21/67

Abstract:
Provided is a method of controlling temperatures of objects to be heated in a heating unit by adjusting a heating rate of each of a plurality of heating elements, based on temperature detection values detected at a plurality of temperature detection elements, wherein the plurality of temperature detection elements are positioned at different positions and the plurality of heating elements are positioned at different positions. The method includes estimating a temperature of each of the plurality of temperature detection elements by using a first estimation algorithm when one of the plurality of temperature detection elements is broken, based on the temperature detection values of the temperature detection elements excluding the broken temperature detection element, and controlling the temperatures of the objects to be heated based on the estimated temperatures.
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