Invention Grant
US09209226B2 Three-dimensional semiconductor device and method of manufacturing the same 有权
三维半导体器件及其制造方法

Three-dimensional semiconductor device and method of manufacturing the same
Abstract:
A 3D semiconductor device and a method of manufacturing the same are provided. The 3D semiconductor device includes a semiconductor substrate, a common source region formed on the semiconductor substrate and extending in a line shape, an active region formed on the common source region and including a lateral channel region, which is substantially in parallel to a surface of the semiconductor substrate, and source and drain regions that are branched from the lateral channel region to a direction substantially perpendicular to the surface of the semiconductor substrate, and a gate formed in a space between the source region and the drain region.
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