Invention Grant
- Patent Title: Three-dimensional semiconductor device and method of manufacturing the same
- Patent Title (中): 三维半导体器件及其制造方法
-
Application No.: US14150523Application Date: 2014-01-08
-
Publication No.: US09209226B2Publication Date: 2015-12-08
- Inventor: Jun Kyo Suh
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2013-0106472 20130905
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L27/24 ; H01L45/00 ; H01L27/22

Abstract:
A 3D semiconductor device and a method of manufacturing the same are provided. The 3D semiconductor device includes a semiconductor substrate, a common source region formed on the semiconductor substrate and extending in a line shape, an active region formed on the common source region and including a lateral channel region, which is substantially in parallel to a surface of the semiconductor substrate, and source and drain regions that are branched from the lateral channel region to a direction substantially perpendicular to the surface of the semiconductor substrate, and a gate formed in a space between the source region and the drain region.
Public/Granted literature
- US20150060752A1 THREE-DIMENSIONAL SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2015-03-05
Information query
IPC分类: