Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing the same
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US13601156Application Date: 2012-08-31
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Publication No.: US09209295B2Publication Date: 2015-12-08
- Inventor: Masaaki Higushi , Atsushi Fukumoto
- Applicant: Masaaki Higushi , Atsushi Fukumoto
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-266996 20111206
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/78 ; H01L21/28

Abstract:
According to one embodiment, a semiconductor memory device includes: a substrate; a stacked body including a plurality of electrode layers and a plurality of insulating layers, both of them being alternately stacked on the substrate; a cap film provided in contact with the electrode layer within a hole formed to penetrate the stacked body; an insulating film provided on a side wall of the cap film and including a charge accumulation film; and a channel body provided on a side wall of the insulating film. The cap film includes a protrusion portion protruding toward the insulating film. In the cap film, a film thickness of a portion where the protrusion portion is provided in a direction in which the protrusion portion protrudes is larger than a film thickness of the other portions where the protrusion portion is not provided.
Public/Granted literature
- US20130228853A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2013-09-05
Information query
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