Invention Grant
- Patent Title: Fin field effect transistor
- Patent Title (中): 鳍场效应晶体管
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Application No.: US14337494Application Date: 2014-07-22
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Publication No.: US09209300B2Publication Date: 2015-12-08
- Inventor: Hung-Ta Lin , Chu-Yun Fu , Shin-Yeh Huang , Shu-Tine Yang , Hung-Ming Chen
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L29/78 ; H01L29/66

Abstract:
A fin field effect transistor including a first insulation region and a second insulation region over a top surface of a substrate. The first insulation region includes tapered top surfaces, and the second insulation region includes tapered top surfaces. The fin field effect transistor further includes a fin extending above the top surface between the first insulation region and the second insulation region. The fin includes a first portion having a top surface below the tapered top surfaces of the first insulation region. The fin includes a second portion having a top surface above the tapered top surfaces of the first insulation region.
Public/Granted literature
- US20140327091A1 FIN FIELD EFFECT TRANSISTOR Public/Granted day:2014-11-06
Information query
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