Invention Grant
US09209339B2 Mechanisms for forming backside illuminated image sensor structure 有权
形成背面照明图像传感器结构的机制

Mechanisms for forming backside illuminated image sensor structure
Abstract:
Embodiments of mechanisms of a backside illuminated image sensor structure are provided. The backside illuminated image sensor structure includes a device substrate having a frontside and a backside and pixels formed at the frontside of the substrate. The backside illuminated image sensor structure further includes a metal element formed in a dielectric layer over the backside of the substrate and a color filter layer formed over the dielectric layer. In addition, the metal element is configured to form a light blocking area in the device substrate and is made of copper.
Public/Granted literature
Information query
Patent Agency Ranking
0/0