Invention Grant
- Patent Title: Method and apparatus for generating plasma pulses
- Patent Title (中): 用于产生等离子体脉冲的方法和装置
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Application No.: US13746784Application Date: 2013-01-22
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Publication No.: US09210792B2Publication Date: 2015-12-08
- Inventor: Roland Gesche
- Applicant: Forschungsverbund Berlin e.V.
- Applicant Address: DE Berlin
- Assignee: Forschungsverbund Berlin E.V.
- Current Assignee: Forschungsverbund Berlin E.V.
- Current Assignee Address: DE Berlin
- Agency: Norris McLaughlin & Marcus, P.A.
- Priority: DE102012200878 20120123
- Main IPC: H05H1/46
- IPC: H05H1/46 ; H05H1/48

Abstract:
A method and apparatus generates pulses that can be used for high-precision three-dimensional plasma treatment. At least two sources are furnished with at least one time function, wherein each of the at least two sources radiates an electromagnetic field generated by one of the time functions, and the at least one time function. In a method, the at least two sources cooperate in such a manner that at least one predetermined field strength is realized sequentially in a temporal succession in at least two predetermined space-time points. An alternative method uses at least one source and at least one reflection element. An apparatus with at least two sources and at least one data processing device or at least one source, at least one reflection element and at least one data processing device is configured such that one of the methods can be executed.
Public/Granted literature
- US20130187544A1 METHOD AND APPARATUS FOR GENERATING PLASMA PULSES Public/Granted day:2013-07-25
Information query
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