Invention Grant
- Patent Title: Apparatuses and methods for compensation of carrier distortions from measurement machines
- Patent Title (中): 用于补偿测量机器的载波失真的装置和方法
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Application No.: US13233621Application Date: 2011-09-15
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Publication No.: US09210814B2Publication Date: 2015-12-08
- Inventor: Mikael Wahlsten
- Applicant: Mikael Wahlsten
- Applicant Address: SE Taby
- Assignee: MYCRONIC AB
- Current Assignee: MYCRONIC AB
- Current Assignee Address: SE Taby
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: G03B27/68
- IPC: G03B27/68 ; H05K3/00 ; G03F7/20 ; G03F9/00 ; H05K1/02 ; H05K3/46
Abstract:
In a method for generating a pattern on a workpiece having at least one die placed thereon, positions of the at least one die and at least two global alignment marks on the workpiece are measured, pattern adjustment data is generated, pattern image data associated with the pattern to be written is adjusted based on the generated pattern adjustment data, and the pattern is generated on the workpiece based on the modified pattern adjustment data.
Public/Granted literature
- US20120062862A1 Apparatuses And Methods For Compensation Of Carrier Distortions From Measurement Machines Public/Granted day:2012-03-15
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