Invention Grant
- Patent Title: Method for making a semiconductor structure with a buried ground plane
- Patent Title (中): 制造具有埋地面的半导体结构的方法
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Application No.: US13914188Application Date: 2013-06-10
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Publication No.: US09214515B2Publication Date: 2015-12-15
- Inventor: Yannick Le Tiec , Francois Andrieu
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P
- Priority: FR0855587 20080814
- Main IPC: H01L29/16
- IPC: H01L29/16 ; H01L21/762

Abstract:
The invention relates to a method for making a semiconducting structure, including: a) forming, on the surface of a semiconductor substrate (2), called the final substrate, a semiconducting layer (4), doped with elements from columns III and V of the Periodic Table so as to form a ground plane, b) forming a dielectric layer (3), c) then assembling, by direct adhesion of the source substrate, on the final substrate (2), the layer (4) forming the ground plane between the final substrate and the source substrate, the dielectric layer being between the source substrate and the ground plane, d) then thinning the source substrate, leaving, on the surface of the semiconductor structure, a film (20) made from a semiconducting material.
Public/Granted literature
- US20130341649A1 METHOD FOR MAKING A SEMICONDUCTOR STRUCTURE WITH A BURIED GROUND PLANE Public/Granted day:2013-12-26
Information query
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