Invention Grant
- Patent Title: Wavelength sensitive sensor photodiodes
- Patent Title (中): 波长敏感传感器光电二极管
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Application No.: US14177616Application Date: 2014-02-11
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Publication No.: US09214588B2Publication Date: 2015-12-15
- Inventor: Peter Steven Bui , Narayan Dass Taneja , Manoocher Mansouri Aliabadi
- Applicant: OSI Optoelectronics, Inc.
- Applicant Address: US CA Hawthorne
- Assignee: OSI Optoelectronics, Inc.
- Current Assignee: OSI Optoelectronics, Inc.
- Current Assignee Address: US CA Hawthorne
- Agency: Novel IP
- Main IPC: H01L31/06
- IPC: H01L31/06 ; H01L31/11 ; H01L31/0352 ; H01L31/101 ; H01L31/103 ; H01L31/18 ; H01L31/0236 ; H01L27/146

Abstract:
The present invention is directed toward a dual junction photodiode semiconductor devices with improved wavelength sensitivity. The photodiode employs a high quality n-type layer with relatively lower doping concentration and enables high minority carrier lifetime and high quantum efficiency with improved responsivity at multiple wavelengths. In one embodiment, the photodiode comprises a semiconductor substrate of a first conductivity type, a first impurity region of a second conductivity type formed epitaxially in the semiconductor substrate, a second impurity region of the first conductivity type shallowly formed in the epitaxially formed first impurity region, a first PN junction formed between the epitaxially formed first impurity region and the second impurity region, a second PN junction formed between the semiconductor substrate and the epitaxially formed first impurity region, and at least one passivated V-groove etched into the epitaxially formed first impurity region and the semiconductor substrate.
Public/Granted literature
- US20140319642A1 Wavelength Sensitive Sensor Photodiodes Public/Granted day:2014-10-30
Information query
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