Invention Grant
- Patent Title: Size-controllable opening and method of making same
- Patent Title (中): 尺寸可控开口及其制作方法
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Application No.: US13645658Application Date: 2012-10-05
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Publication No.: US09214622B2Publication Date: 2015-12-15
- Inventor: John H. Zhang
- Applicant: STMicroelectronics, Inc.
- Applicant Address: US TX Coppell
- Assignee: STMicroelectronics, Inc.
- Current Assignee: STMicroelectronics, Inc.
- Current Assignee Address: US TX Coppell
- Agency: Gardere Wynne Sewell LLP
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H01L41/332

Abstract:
A support structure includes an internal cavity. An elastic membrane extends to divide the internal cavity into a first chamber and a second chamber. The elastic membrane includes a nanometric-sized pin hole extending there through to interconnect the first chamber to the second chamber. The elastic membrane is formed of a first electrode film and a second electrode film separated by a piezo insulating film. Electrical connection leads are provided to support application of a bias current to the first and second electrode films of the elastic membrane. In response to an applied bias current, the elastic membrane deforms by bending in a direction towards one of the first and second chambers so as to produce an increase in a diameter of the pin hole.
Public/Granted literature
- US20130093289A1 SIZE-CONTROLLABLE OPENING AND METHOD OF MAKING SAME Public/Granted day:2013-04-18
Information query
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