A method of making a solid oxide fuel cell (SOFC) includes providing a solid oxide electrolyte and depositing at least one electrode on the electrolyte by PVD, such as sputtering. A method of making an interconnect for a fuel cell stack includes providing an electrically conductive interconnect, and depositing a layer on the interconnect by PVD, such as depositing a LSM barrier layer by sputtering. The SOFC and the interconnect may be located in the same fuel cell stack.