Invention Grant
US09218994B2 Two-dimensional transfer station used as interface between a process tool and a transport system and a method of operating the same 有权
用作处理工具和运输系统之间的界面的二维转运站及其操作方法

Two-dimensional transfer station used as interface between a process tool and a transport system and a method of operating the same
Abstract:
By providing a space-efficient transfer buffer system in a manufacturing environment, which may act as a local interface between an automated transport system and the load port assembly of a process tool under consideration, the I/O capability of the process tool may be significantly enhanced, while not unduly contributing to the overall width of the process tools. In particular embodiments, an array-like arrangement of respective buffer places is used, wherein each buffer place is accessible by the transport system and may also interact with each of the load ports of the process tool.
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