Invention Grant
- Patent Title: Two-dimensional transfer station used as interface between a process tool and a transport system and a method of operating the same
- Patent Title (中): 用作处理工具和运输系统之间的界面的二维转运站及其操作方法
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Application No.: US12039980Application Date: 2008-02-29
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Publication No.: US09218994B2Publication Date: 2015-12-22
- Inventor: Olaf Zimmerhackl , Alfred Honold
- Applicant: Olaf Zimmerhackl , Alfred Honold
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Priority: DE102007035836 20070731
- Main IPC: B65H1/00
- IPC: B65H1/00 ; H01L21/67 ; H01L21/677

Abstract:
By providing a space-efficient transfer buffer system in a manufacturing environment, which may act as a local interface between an automated transport system and the load port assembly of a process tool under consideration, the I/O capability of the process tool may be significantly enhanced, while not unduly contributing to the overall width of the process tools. In particular embodiments, an array-like arrangement of respective buffer places is used, wherein each buffer place is accessible by the transport system and may also interact with each of the load ports of the process tool.
Public/Granted literature
Information query