Invention Grant
- Patent Title: Method of manufacturing a semiconductor component
- Patent Title (中): 制造半导体部件的方法
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Application No.: US13889573Application Date: 2013-05-08
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Publication No.: US09219010B2Publication Date: 2015-12-22
- Inventor: Michael J. Seddon , Francis J. Carney
- Applicant: Semiconductor Components Industries, LLC
- Applicant Address: US AZ Phoenix
- Assignee: SEMICONDUCTOR COMPONENETS INDUSTRIES, LLC
- Current Assignee: SEMICONDUCTOR COMPONENETS INDUSTRIES, LLC
- Current Assignee Address: US AZ Phoenix
- Agent Rennie William Dover
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/768 ; H01L23/00 ; H01L23/58 ; H01L23/31

Abstract:
A method for manufacturing a semiconductor component that includes the use of multiple layers of photoresist. A first layer of electrically conductive material is formed over a substrate and a first layer of photoresist is formed over the first layer of electrically conductive material. A portion of the first layer of photoresist is removed leaving photoresist having sidewalls separated by a gap. A second layer of electrically conductive material having first and second sidewalls is formed in the gap. A second layer of photoresist is formed over the first layer of photoresist and over the second layer of electrically conductive material. Portions of the second layer of photoresist and the first layer of photoresist are removed to uncover the first and second edges of the second layer of electrically conductive material. A protective structure is formed over the first and second edges of the second electrically conductive material.
Public/Granted literature
- US20130244418A1 METHOD OF MANUFACTURING A SEMICONDUCTOR COMPONENT Public/Granted day:2013-09-19
Information query
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