Invention Grant
US09219017B2 Radio frequency semiconductor device package and method for manufacturing same, and radio frequency semiconductor device 有权
射频半导体器件封装及其制造方法以及射频半导体器件

Radio frequency semiconductor device package and method for manufacturing same, and radio frequency semiconductor device
Abstract:
A radio frequency semiconductor device package includes a metal base plate, a first metal wall, a second metal wall, and feed-through parts. The first metal wall is provided with first and second openings and connected onto the metal base plate. The openings are set back from a lower surface side and do not reach an upper surface. The second metal wall is connected to the upper surface of the first metal wall. Thickness of the second metal wall is larger than thickness of the first metal wall. The feed-through parts include insulators and line patterns insulated from the first and second metal walls and are joined to inner walls of the openings and the metal base plate.
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