Invention Grant
US09219051B2 Laminate peripheral clamping to control microelectronic module BSM warpage
有权
层压外围夹紧控制微电子模块BSM翘曲
- Patent Title: Laminate peripheral clamping to control microelectronic module BSM warpage
- Patent Title (中): 层压外围夹紧控制微电子模块BSM翘曲
-
Application No.: US13910169Application Date: 2013-06-05
-
Publication No.: US09219051B2Publication Date: 2015-12-22
- Inventor: Stephanie Allard , Martin Beaumier , Jean-Francois Drapeau , Jean Labonte , Steven P. Ostrander , Sylvain Ouimet
- Applicant: International Business Machines Corporation
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agent Michael A. Petrocelli; Howard M. Cohn
- Main IPC: B23Q7/00
- IPC: B23Q7/00 ; H01L21/687 ; H01L23/00 ; H05K3/00 ; H01L23/367

Abstract:
A clamping apparatus and method for applying a force to a workpiece during processing includes a base defining a work area. The work area is configured to receive a joined structure including a substrate and a die. A component is positionable in the work area and over the joined structure. An adjustable releasable structure is positionable over the component and the joined structure and includes a resilient mechanism having an inner member for contacting the component to apply an inner downward force to the component. The resilient mechanism also includes outer members for applying an outer downward force to opposing distal edge areas of the substrate. An external downward force is applied to the adjustable releasable structure, such that the inner and outer members apply the inner and outer downward forces to the component and the opposing distal edge areas of the substrate, respectively, during processing of the joined structure.
Public/Granted literature
- US20140359996A1 LAMINATE PERIPHERAL CLAMPING TO CONTROL MICROELECTRONIC MODULE BSM WARPAGE Public/Granted day:2014-12-11
Information query