A light receiving section and a substrate-side electrode pad of a photoelectric conversion substrate, a base-side electrode pad and an interconnect arranged on a surface side of a base are integrally coated with a protective layer. A scintillation layer is formed on a surface side of the protective layer. Corrosion of a photoelectric conversion element of the light receiving section, the electrode pads and the interconnect is prevented by the protective layer. When they are integrally coated with the protective layer, the light receiving section and the substrate-side electrode pad of the photoelectric conversion substrate can be arranged with a distance therebetween shortened, thereby realizing miniaturization of a detector and enlargement of the light receiving section.