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US09219190B2 Single photon source die and method of manufacturing the same 有权
单光子源模及其制造方法

Single photon source die and method of manufacturing the same
Abstract:
A single photon source die includes a first semiconductor layer, a plurality of columnar structures formed on the first semiconductor layer, a second semiconductor layer formed on the columnar structures. Each columnar structure includes a bottom layer, a single photon point layer and a connecting layer. The single photon point layer includes a plurality of single photon points.
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