Invention Grant
- Patent Title: Pressure and ultrasonic sensor
- Patent Title (中): 压力和超声波传感器
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Application No.: US14343526Application Date: 2012-08-28
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Publication No.: US09221171B2Publication Date: 2015-12-29
- Inventor: Makiko Sugiura , Hirofumi Higuchi
- Applicant: Makiko Sugiura , Hirofumi Higuchi
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JP2011-240522 20111101
- International Application: PCT/JP2012/005386 WO 20120828
- International Announcement: WO2013/065219 WO 20130510
- Main IPC: G01L1/00
- IPC: G01L1/00 ; G01L1/16 ; B25J9/16 ; G01B17/00 ; B06B1/06 ; B25J13/08 ; G01L5/22 ; G01L1/25

Abstract:
A complex device includes: a substrate having a thick portion, a cavity and a membrane for bridging the cavity; and multiple piezoelectric elements having a lower electrode, a piezoelectric film and an upper electrode. A part of the piezoelectric elements has a projecting portion arranged on the upper electrode. The part of piezoelectric elements (30) provides a vertical pressure detection element. The piezoelectric elements further have an ultrasonic element other than the vertical pressure detection element. The ultrasonic element is arranged over at least the cavity of the substrate in a horizontal direction.
Public/Granted literature
- US20140214209A1 COMPLEX DEVICE AND ROBOT HAND DRIVE CONTROL APPARATUS Public/Granted day:2014-07-31
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