A substrate processing apparatus is provided with: a detection unit that detects a factor for which interlock is applied to one or more of a plurality of modules and outputs a detection signal; interlocking management unit that, based on the detection signal output from the detecting units, applies interlock to the module to be interlocked if the factor has been occurred; and an alarm management unit that determines parent-child relationships between a parent alarm indicating that the factor for which interlock is applied has been detected, and child alarms each indicating that interlock has been applied to each module, and causes a display unit to display in a grouped manner the parent alarm and the child alarm or alarms having the parent-child relationship.