Invention Grant
US09224673B2 Packages for semiconductor devices, packaged semiconductor devices, and methods of cooling packaged semiconductor devices
有权
用于半导体器件,封装半导体器件的封装以及冷却封装的半导体器件的方法
- Patent Title: Packages for semiconductor devices, packaged semiconductor devices, and methods of cooling packaged semiconductor devices
- Patent Title (中): 用于半导体器件,封装半导体器件的封装以及冷却封装的半导体器件的方法
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Application No.: US13791077Application Date: 2013-03-08
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Publication No.: US09224673B2Publication Date: 2015-12-29
- Inventor: Kim Hong Chen , Wensen Hung , Szu-Po Huang , Shin-Puu Jeng
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L23/473
- IPC: H01L23/473 ; H01L33/64 ; H01L23/46 ; H01L23/44

Abstract:
Packages for semiconductor devices, packaged semiconductor devices, and methods of cooling packaged semiconductor devices are disclosed. In some embodiments, a package for a semiconductor device includes a substrate including a semiconductor device mounting region, a cover coupled to a perimeter of the substrate, and members disposed between the substrate and the cover. The package includes partitions, with each partition being disposed between two adjacent members. The package includes a fluid inlet port coupled to the cover, and a fluid outlet port coupled to one of the partitions.
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