Invention Grant
- Patent Title: Back side illumination image sensor with low dark current
- Patent Title (中): 具有低暗电流的背面照明图像传感器
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Application No.: US14446804Application Date: 2014-07-30
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Publication No.: US09224775B2Publication Date: 2015-12-29
- Inventor: Jean-Pierre Carrere , Patrick Gros D'Aillon , Stephane Allegret-Maret , Jean-Pierre Oddou
- Applicant: STMicroelectronics (Crolles 2) SAS , Commissariat A L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Crolles FR Paris
- Assignee: STMicroelectronics (Crolles 2) SAS,Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee: STMicroelectronics (Crolles 2) SAS,Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Crolles FR Paris
- Agency: Gardere Wynne Sewell LLP
- Priority: FR1357669 20130801
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L27/146

Abstract:
An integrated circuit includes a back side illuminated image sensor formed by a substrate supporting at least one pixel, an interconnect part situated above a front side of the substrate and an anti-reflective layer situated above a back side of the substrate. The anti-reflective layer may be formed of a silicon nitride layer. An additional layer is situated above the anti-reflective layer. The additional layer is formed of one of amorphous silicon nitride or hydrogenated amorphous silicon nitride, in which the ratio of the number of silicon atoms per cubic centimeter to the number of nitrogen atoms per cubic centimeter is greater than 0.7.
Public/Granted literature
- US20150035106A1 BACK SIDE ILLUMINATION IMAGE SENSOR WITH LOW DARK CURRENT Public/Granted day:2015-02-05
Information query
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