Invention Grant
- Patent Title: CMOS nanowire structure
- Patent Title (中): CMOS纳米线结构
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Application No.: US13996503Application Date: 2011-12-23
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Publication No.: US09224810B2Publication Date: 2015-12-29
- Inventor: Seiyon Kim , Kelin J. Kuhn , Tahir Ghani , Anand S. Murthy , Annalisa Cappellani , Stephen M. Cea , Rafael Rios , Glenn A. Glass
- Applicant: Seiyon Kim , Kelin J. Kuhn , Tahir Ghani , Anand S. Murthy , Annalisa Cappellani , Stephen M. Cea , Rafael Rios , Glenn A. Glass
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- International Application: PCT/US2011/067225 WO 20111223
- International Announcement: WO2013/095646 WO 20130627
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/8238 ; H01L27/092 ; H01L27/12 ; B82Y10/00 ; H01L29/66 ; H01L29/775

Abstract:
Complimentary metal-oxide-semiconductor nanowire structures are described. For example, a semiconductor structure includes a first semiconductor device. The first semiconductor device includes a first nanowire disposed above a substrate. The first nanowire has a mid-point a first distance above the substrate and includes a discrete channel region and source and drain regions on either side of the discrete channel region. A first gate electrode stack completely surrounds the discrete channel region of the first nanowire. The semiconductor structure also includes a second semiconductor device. The second semiconductor device includes a second nanowire disposed above the substrate. The second nanowire has a mid-point a second distance above the substrate and includes a discrete channel region and source and drain regions on either side of the discrete channel region. The first distance is different from the second distance. A second gate electrode stack completely surrounds the discrete channel region of the second nanowire.
Public/Granted literature
- US20140197377A1 CMOS NANOWIRE STRUCTURE Public/Granted day:2014-07-17
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