Invention Grant
US09224856B2 LDMOS transistors for CMOS technologies and an associated production method
有权
用于CMOS技术的LDMOS晶体管和相关的生产方法
- Patent Title: LDMOS transistors for CMOS technologies and an associated production method
- Patent Title (中): 用于CMOS技术的LDMOS晶体管和相关的生产方法
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Application No.: US13635535Application Date: 2011-04-07
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Publication No.: US09224856B2Publication Date: 2015-12-29
- Inventor: Thomas Uhlig , Lutz Steinbeck
- Applicant: Thomas Uhlig , Lutz Steinbeck
- Applicant Address: DE Erfurt
- Assignee: X-FAB SEMICONDUCTOR FOUNDRIES AG
- Current Assignee: X-FAB SEMICONDUCTOR FOUNDRIES AG
- Current Assignee Address: DE Erfurt
- Agency: Hunton & Williams LLP
- Priority: DE102010014370 20100409
- International Application: PCT/IB2011/051505 WO 20110407
- International Announcement: WO2011/125043 WO 20111013
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/8238 ; H01L27/092 ; H01L29/06 ; H01L29/66

Abstract:
In a semiconductor component or device, a lateral power effect transistor is produced as an LDMOS transistor in such a way that, in combination with a trench isolation region (12) and the heavily doped feed guiding region (28, 28A), an improved potential profile is achieved in the drain drift region (8) of the transistor. For this purpose, in advantageous embodiments, it is possible to use standard implantation processes of CMOS technology, without additional method steps being required.
Public/Granted literature
- US20130175615A1 LDMOS Transistors For CMOS Technologies And An Associated Production Method Public/Granted day:2013-07-11
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