Invention Grant
- Patent Title: Method and apparatus for manufacturing organic el device
- Patent Title (中): 有机EL器件的制造方法和装置
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Application No.: US14235986Application Date: 2012-10-17
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Publication No.: US09224953B2Publication Date: 2015-12-29
- Inventor: Ryohei Kakiuchi , Satoru Yamamoto , Kanako Hida
- Applicant: NITTO DENKO CORPORATION
- Applicant Address: JP Ibaraki-shi
- Assignee: NITTO DENKO CORPORATION
- Current Assignee: NITTO DENKO CORPORATION
- Current Assignee Address: JP Ibaraki-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2011-229872 20111019; JP2011-245844 20111109; JP2012-020884 20120202; JP2012-113290 20120517
- International Application: PCT/JP2012/076846 WO 20121017
- International Announcement: WO2013/058283 WO 20130425
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L51/00 ; C23C14/12 ; C23C14/56 ; H05B33/10 ; B65H23/32

Abstract:
Provided are a method and an apparatus for manufacturing an organic EL device, which makes it possible to manufacture organic EL devices capable of suppressing quality degradation. The method for manufacturing an organic EL device, in which constituent layers of an organic EL element are formed by deposition over a substrate in the form of a strip, while the substrate is being moved in the longitudinal direction, includes a constituent layer-forming step of performing deposition over one surface of the substrate, while the substrate is being moved in the longitudinal direction, sequentially in first and second deposition units arranged along the moving direction of the substrate by discharging a vaporized material from an evaporation source. The constituent layer-forming step includes a plurality of upward deposition steps and a direction changing step.
Public/Granted literature
- US20140220722A1 METHOD AND APPARATUS FOR MANUFACTURING ORGANIC EL DEVICE Public/Granted day:2014-08-07
Information query
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