Invention Grant
US09227203B2 Depositing apparatus and method for manufacturing organic light emitting diode display using the same 有权
用于制造有机发光二极管显示器的沉积设备和方法

Depositing apparatus and method for manufacturing organic light emitting diode display using the same
Abstract:
A deposition apparatus includes a deposition source that receives a deposition material, and a plurality of spray nozzles arranged in a first direction at one side of the deposition source to spray the deposition material to a facing substrate. The deposition source includes a center area and outer areas, the outer areas being at respective ends of the center area with reference to the first direction. The spray nozzles include first spray nozzles arranged in each outer area and extending outwardly from the deposition source, a surface forming an end of the first spray nozzles forming a first inclination angle with a substrate surface in the first direction.
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