Invention Grant
- Patent Title: Depositing apparatus and method for manufacturing organic light emitting diode display using the same
- Patent Title (中): 用于制造有机发光二极管显示器的沉积设备和方法
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Application No.: US13955322Application Date: 2013-07-31
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Publication No.: US09227203B2Publication Date: 2016-01-05
- Inventor: Sang-Shin Lee
- Applicant: Sang-Shin Lee
- Applicant Address: KR Yongin, Gyeonggi-do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2012-0112027 20121009
- Main IPC: H01L21/00
- IPC: H01L21/00 ; C23C16/00 ; B05B1/14 ; C23C14/04 ; C23C14/24 ; H01L51/56

Abstract:
A deposition apparatus includes a deposition source that receives a deposition material, and a plurality of spray nozzles arranged in a first direction at one side of the deposition source to spray the deposition material to a facing substrate. The deposition source includes a center area and outer areas, the outer areas being at respective ends of the center area with reference to the first direction. The spray nozzles include first spray nozzles arranged in each outer area and extending outwardly from the deposition source, a surface forming an end of the first spray nozzles forming a first inclination angle with a substrate surface in the first direction.
Public/Granted literature
- US20140099740A1 DEPOSITING APPARATUS AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DIODE DISPLAY USING THE SAME Public/Granted day:2014-04-10
Information query
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