Invention Grant
- Patent Title: Retaining ring with attachable segments
- Patent Title (中): 固定环带有可连接片段
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Application No.: US14219913Application Date: 2014-03-19
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Publication No.: US09227297B2Publication Date: 2016-01-05
- Inventor: Irfanulla Khuddus Rahmathullah , Bopanna Ichettira Vansantha , Padma Gopalakrishnan , Abraham Palaty , Aswathnarayanaiah Ravi , Ashish Bhatnagar , Young J. Paik , Stacy Meyer , Daniel Martin
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B37/30
- IPC: B24B37/30 ; B24B37/32
Abstract:
A retaining ring includes a generally annular upper portion having a top surface configured to be connected to a base of a carrier head and a lower surface, and a plurality of substantially identical arcuate segments detachably secured to the upper portion to form an annular lower portion. Each of the arcuate segments has an upper surface that abuts the lower surface of the upper portion and a bottom surface for contacting a polishing pad during polishing.
Public/Granted literature
- US20140287662A1 RETAINING RING WITH ATTACHABLE SEGMENTS Public/Granted day:2014-09-25
Information query
