Invention Grant
US09227834B2 Edge-reinforced micromechanical component 有权
边缘增强微机械部件

Edge-reinforced micromechanical component
Abstract:
The present subject matter relates to a micromechanical component having a top face and a bottom face and at least two side faces, and a coating of diamond and/or diamond-like carbon (DLC) which encompasses all the surfaces of the component, wherein on at least one side face, across at least a part of said side face, the coating has a smaller coating thickness than that of the top face and/or bottom face, so that a reinforced area in reference to the at least one side face is produced.
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